Improved mask performance : AMTC uses the ZEI CDC/RegC technology for mask performance improvement

JENA/Germany, 12.08.2015.

In order to achieve specifications for high end photomasks reliably, the Advanced Mask Technology Center (AMTC), a joint venture of GLOBALFOUNDRIES and Toppan Photomasks, has integrated a ZEISS CDC/RegC system into their Dresden facility. The tool can improve Critical Dimension (CD) uniformity of photomasks with high accuracy. In addition it includes a registration repair functionality enabling mask registration and wafer overlay improvement.

Continuously shrinking designs by further extension of 193nm technology lead to increased requirements in terms of overlay, registration and Critical Dimension uniformity across the mask. With CDC/RegC tool we have proven technology to fine-tune these critical parameters to better support the needs of our wafer fab customers. states AMTC.

AMTC is already familiar with the concept of CD and REG repair based on a first generation tool of the same tooltype which was evaluated and used at AMTC. Now, with the more mature tool this concept will be brought into the mask production to help increase performance at the wafer fab of AMTC's parent-companies and in the mask house. The ZEISS CDC/RegC Combo improves CD uniformity (CDU) and registration uniformity across photomasks with high repeatability and precision by employing a femtosecond laser technology. By the use of a dedicated algorithm combined with a tunable laser system, the laser pulse implants arrays of dots in the glass bulk with adjustable optical and mechanical properties. This enables the mask manufacturer to help the chip makers to meet tightest CDU and registration/overlay specifications.

Nadine Sch tze

Marketing & Communication

Semiconductor Manufacturing Technology

Phone: +49 3641 64-4051

Fax:

nadine.schuetze@zeiss.com

About AMTC

The Advanced Mask Technology Center GmbH & Co. KG (AMTC) is an equally owned joint venture of GLOBALFOUNDRIES and Toppan Photomasks, Inc. AMTC is a world-leading center for the development and production of advanced photolithographic masks. More information is available at www.amtc-dresden.com.

About ZEISS

ZEISS is an internationally leading technology enterprise operating in the optics and optoelectronics industries. ZEISS develops and distributes lithography optics, measuring technology, microscopes, medical technology, eyeglass lenses, camera and cine lenses, binoculars and planetarium technology. With its solutions, the company constantly advances the world of optics and helps shape technological progress. The company is divided up into the six business groups Industrial Metrology, Microscopy, Medical Technology, Vision Care, Consumer Optics and Semiconductor Manufacturing Technology. ZEISS is represented in over 40 countries with around 30 production sites, over 50 sales and service locations and about 25 research and development facilities.

In fiscal year 2013/14 the company generated revenue approximating 4.3 billion euros with just under 25,000 employees. Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany. Carl Zeiss AG is the strategic management holding company that manages the ZEISS Group. The company is wholly owned by the Carl Zeiss Stiftung (Carl Zeiss Foundation).

Further Information at www.zeiss.com

Semiconductor Manufacturing Technology

With a broad product portfolio and globally leading know-how in the fields of lithography and optical modules, the business group covers key processes in microchip production. Semiconductor Manufacturing Technology includes the Semiconductor Manufacturing Optics and Semiconductor Metrology Systems strategic business units. The business group generated revenues of 1.047 billion euros in fiscal year 2013/14 and has a workforce of over 2,900 people. The business group is headquartered in Oberkochen.

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