Succeful partnership: ZEI continues close cooperation with major IDM in Sou Korea for high-end registration metrology

JENA/Germany, 07.06.2016.

The main memory chip maker of South Korea has approved the Final Acceptance Test for the ZEISS PROVE HR system, the premier photomask registration and overlay metrology tool. Recently the ZEISS PROVE HR has been implemented into the mask production flow, with focus on latest multi pattering nodes and EUV technology.

ZEISS PROVE registration tools of all tool generations are operated at South Korea's major IDM since their market introduction in 2010 and is pioneering in pattern placement metrology with 193 nm illumination wavelength for memory as well as logic devices.

ZEISS PROVE HR is designed for the calibration of Variable Shape Beam (VSB) as well as multi beam writers. ZEISS PROVE HR measures registration and overlay on photomasks with sub-nanometer repeatability and accuracy at indie features and metrology targets.

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The next generation of the ZEISS photomask registration and overlay metrology system PROVE(R)

Press Contact

Nadine Sch tze

Marketing & Communication

Semiconductor Manufacturing Technology

Phone: +49 3641 64-4051

Fax:

nadine.schuetze@zeiss.com

About ZEISS

ZEISS is an internationally leading technology enterprise operating in the optics and optoelectronics industries. The ZEISS Group develops and distributes semiconductor manufacturing equipment, measuring technology, microscopes, medical technology, eyeglass lenses, camera and cine lenses, binoculars and planetarium technology. With its solutions, the company constantly advances the world of optics and helps shape technological progress. ZEISS is divided up into the four segments Semiconductor Manufacturing Technology, Research & Quality Technology, Medical Technology, and Vision Care/ Consumer Optics. ZEISS is represented in over 40 countries and operates more than 30 production sites, over 50 sales and service locations and about 25 research and development facilities. In fiscal year 2014/15 the company generated revenue approximating 4.5 billion with around 25,000 employees. Founded in 1846 in Jena, the company is headquartered in Oberkochen, Germany. Carl Zeiss AG is the strategic management holding company that manages the ZEISS Group. The company is wholly owned by the Carl Zeiss Stiftung (Carl Zeiss Foundation).

Further information at www.zeiss.de

Semiconductor Manufacturing Technology

With a broad portfolio of products and globally leading know-how in the areas of lithography and optical modules, the business group covers various key processes in microchip production. Semiconductor Manufacturing Technology includes the Semiconductor Manufacturing Optics and Semiconductor Metrology Systems strategic business units. It is headquartered in Oberkochen. During fiscal year 2014/15, this segment generated revenue of 893 million and employed around 2,800 people.

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