JENA/Germany, 10.09.2013.
Nuflare recently purchased the ZEISS future high resolution metrology tool PROVE HR which will be used to optimize next generation e-beam mask writers. PROVE HR will enable the calibration of most advanced mask writing tools needed to support upcoming optical as well as next generations lithography technologies like EUV.
Yoshitake Shusuke, Chief Specialist at Nuflare Technology, Inc., comments the purchase: "The new PROVE HR from ZEISS will be the only tool which helps us to adjust the smallest deflection fields in our e-beam tools for any remaining placement error. With its superior resolution, PROVE HR provides a much higher sampling of small features and therefore better tool calibration. In other words: We can correct what we measure."
Highlight of the upcoming PROVE HR is a new beam path working with NA of 0.8 together with higher throughput in order to support upcoming sampling requirements as needed for multi patterning and EUV. Nuflare will use the ZEISS metrology tool to develop special calibration routines for newest mask writer generations.
Dr. Dirk Beyer, Senior Product Manager PROVE at ZEISS, states: "The PROVE product family is characterized through the measurement of registration and overlay on photomasks with sub-nanometer repeatability and accuracy. The PROVE HR complements our registration metrology offerings by enhancing our customer's capability to measure registration on even smaller mask features coming up on any type of future photomask. The mask shops around the world can probe now any critical hot spot while performing in-die registration metrology for all types of photomasks.
Further information regarding the PROVE family tools PROVE Compact and PROVE HR can be found on the website http://smt.zeiss.com/semiconductor-manufacturing-technology/en_de/products-solutions/photomask-systems/mask-metrology.html.
Nadine Sch tze
ZEISS Semiconductor Manufacturing Technology
Phone: +49 3641 64-4051
Email:
nadine.schuetze@zeiss.com Number: 0118-2013-ENG SE
Number of Words: 327
Number of Characters: 2588
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JENA/Germany, 10.09.2013. 
